Universal Wafer-Carrier Station
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-08
A wafer-carrier station with the versatility of accommodating carriers of different sizes reduces the time required to change from one carrier size to another. The wafer-carrier station includes a locator bar 1 and a carrier hold-down clip 2 mounted on a base plate 3, as shown in Fig. 1. The locator bar 1 has slots for wafer carrier positioning (Fig. 2). They are configured to handle 100 mm 4, 125 mm 5, and 150 mm 6 carriers. An 82 mm carrier 7 is positioned between the locator bar 1 and two locator pins 8 affixed to the base plate 3. The hold-down clip 2 locks the wafer carriers in place. With the hold-down clip 2 in the pulled-out position 9 (Fig. 1), the wafer carrier 10 is placed into the slot which corresponds to its size. The clip 2 is then pushed into the lock position.