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Universal Wafer-Boat-Alignment Fixture

IP.com Disclosure Number: IPCOM000060419D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-08

Publishing Venue

IBM

Related People

Authors:
Clarke, GV [+details]

Abstract

The Universal Wafer-Boat-Alignment Fixture allows any type of wafer-boat-handling apparatus to accommodate wafer boats of varying sizes without expensive replacement of the boat-alignment apparatus. As an example, this disclosure is based upon modification of a wafer elevator, but its applicability to any type of wafer-boat-handling apparatus will be readily apparent. Referring to Fig. 1, the wafer-boat-alignment fixture 10 comprises an L-shaped piece of material, metal or plastic. Notches 12 are cut into the surfaces of the fixture 10 for alignment of the edges of a wafer boat. Referring to Fig. 2 which is a top view of a wafer elevator platform 14, two alignment fixtures 10 are located on the elevator platform 14.