Probe Alignment Aid
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-08
This article describes an electrical shorting cross with probes in all four quadrants to detect "X", "Y", or theta misalignment of a wafer/ chip under test. To implement this technique of detecting and correcting the misalignment of an integrated circuit pattern under electrical test, a conductive (metal) cross that is accessible to probes must be added to the probe pattern to be tested. Furthermore, four quadrant probes must be added to the probe card. Through the utilization of a simple resistance check between probes by the controller, the direction of misalignment is detected and corrected. For example, if probes #1 and #2 or #3 and #4 are shorted, an "X" coordinate correction in either the negative or positive direction is sensed.