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Selective Laser Etching of Chromium - Dry Process

IP.com Disclosure Number: IPCOM000060607D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Lankard, JR Parsons, AH [+details]

Abstract

This article describes a dry process procedure that produces the selective removal of desired portions of a chromium metal layer with the use of an excimer laser. The procedure does not require the use of a resist mask to produce the desired pattern.