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Defocused E-beam for Testing

IP.com Disclosure Number: IPCOM000060637D
Original Publication Date: 1986-Mar-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Chiu, GLT [+details]

Abstract

In the stroboscopic sampling mode of E-beam testing, a 1 nanosecond pulse window for the unblanked e-beam at 0.16 nanoam contains only 1 electron hitting the device under test. E-beam testing required long integration time to get a decent signal- to-noise ratio in this case. The operating temperature of the thermionic source can be increased, which increases the primary beam current at the expense of very short lifetime for the beam source. Alternatively field emission guns also have higher brightness. They need very high vacuum which is inconvenient to testing.