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In-line Corrosion Stress Test Monitor Post Second Level Metal for Multi-level Semiconductor Devices

IP.com Disclosure Number: IPCOM000060665D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Fresia, JF Narechania, RG [+details]

Abstract

This article describes a stress test that will detect corrosion early in a multi-level semiconductor process enabling an early evaluation of a new process or technology development and thereby enhance process development cycle times.