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Epitaxial Compensation of Trench Etch Bias

IP.com Disclosure Number: IPCOM000060668D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Kenney, DM [+details]

Abstract

This article describes a technique which may be used to compensate for image size and/or photo and etch bias.