Browse Prior Art Database

Non-convection Heat Sink for Use in a Vacuum

IP.com Disclosure Number: IPCOM000060677D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Evans, RJ [+details]

Abstract

A technique is described for removing heat generated by a semiconductor chip/wafer when operating in the vacuum chamber scanning electron microscope (SEM).