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Product Yield Advancement Test Site Structure With Anti-slip Resist Design Disclosure Number: IPCOM000060678D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-09

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Bonges, HA III [+details]


This article features a technique used to fabricate metal structures on smooth surface wafers which will minimize or elimina tendency for resist to float and slide between long narrow metal lines.