Browse Prior Art Database

Product Yield Advancement Test Site Structure With Anti-slip Resist Design

IP.com Disclosure Number: IPCOM000060678D
Original Publication Date: 1986-Apr-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Bonges, HA III [+details]

Abstract

This article features a technique used to fabricate metal structures on smooth surface wafers which will minimize or elimina tendency for resist to float and slide between long narrow metal lines.