Two-Terminal Active Matrix LCD Using Al2o3
Original Publication Date: 1986-May-01
Included in the Prior Art Database: 2005-Mar-09
Described is a lateral metal/insulator/metal ("MIM") capacitive element used in series with a liquid crystal display (LCD) picture element. The device uses aluminum and aluminum oxide to replace the tantalum and tantalum pentoxide films typically used in such devices. As shown in Fig. 1, of the drawing, the device comprises a substrate 1 of glass on which an insulating layer 2 is formed. A metal electrode 3, which has an insulating layer 4on top of it, is formed on the insulating layer 2. Another metal electrode 5 couples the aluminum electrode 3 to a transparent electrode 6 of the display. Fig. 2 shows the process steps for constructing the device shown in Fig. 1. Note that the substrate material can be soda lime glass rather than PYREX* because the disclosed fabrication process does not require high temperatures.