Vacuum-Compatible Wafer Handler
Original Publication Date: 1986-Jun-01
Included in the Prior Art Database: 2005-Mar-09
A modification of a wafer-handling tool makes it possible to pick up and place semiconductor wafers from multiple vacuum-pumped ante-chambers into the main chamber of a vacuum-processing tool. The handling tool was previously limited to operating under atmospheric conditions. A key element of the device is the "frog leg" picker mechanism (Fig. 1). It has an extend/retract mechanism incorporating two sets of bars 4 which have the capability of being driven so as to move the wafer 1 to an extended position 2 or a retracted position 21 through the intermediate position 3 with 360-degree rotation. The tool was modified by placing the motion mechanism into the vacuum chamber with the drive mechanism in atmosphere. The parts specifically used from the original tool (Fig.