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An electrolyte filled felt tip penlike probe allows the testing of semiconductor devices without damage to the probed area.
English (United States)
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Non-destructive Probe for Resistivity Measurements
An electrolyte filled felt tip penlike probe allows the testing of semiconductor
devices without damage to the probed area.
The probe per se- consists of a very fine felt-tipped probe saturated with an
electrolyte, which is chosen to be chemically non-reactive with the device
materials. A suitable electrolyte is 1 molar of K2HP04, which has a moderate
surface tension and a low resistance.
The use of a soft probe reduces the susceptibility to damage caused by hand
probe tips such as tungsten carbide and high contact pressures necessary to
achieve a low ohmic contact with the test area. The electrolyte wets the test area
so as to achieve the necessary low contact resistance while preserving the
integrity of the shallow diffusion layers.
A typical test setup is shown schematically in the drawing. Four pens 10, 11,
12 and 13 are deployed in a linear array as shown with a current I applied across
the outer pens 10 and 13. The voltage V is measured across the two inner pens
11 and 12 giving rise to the following relationships: V _ p (ohms-cm) = I 2fS
where S = spacing between probes in cm I = driving current V = measured
voltage ps (ohms/square) = V f _ _ I Ln2 wherein s = the sheet resistance and
Ln = natural logarithm.
The use of the probes in this configuration permits measurement of sheet
resistance greater than 1000 ohms/squ