Method of Fabricating Deflection Coils for Electron Lithography Systems
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09
The use of multilayer ceramic (MLC) techniques is proposed for fabricating deflection coils for electron beam lithography machines. Preformed unfired ceramic sheets with metallization patterns, applied as a conductive paste by a silk screen process, are stacked together and fired to form an accurately defined monolithic deflection coil assembly, which is compact and mechanically stable. Conductor positions cannot move relative to each other due to thermal expansion or otherwise. Cooling channels also could be provided through the assembly. Deflection coil assemblies are typically wound with copper wire on insulating coil forms. In order to maintain uniformity of the deflection field and the orthogonality of X-Y axes, precise tolerances are required.