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Photochemical Etching of Metals With Chloro-brominated Methane Gases

IP.com Disclosure Number: IPCOM000061417D
Original Publication Date: 1986-Jun-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Chuang, TJ Moylan, CR [+details]

Abstract

Interest in laser-induced etching of metals has intensified recently. We have performed such photochemical etching by photolyzing CCl3Br at copper and chromium surfaces to yield bromine atoms and CCl3 radicals, and found very high metal etch rates.