E-Beam Testing of Printed Circuit Conductors
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09
Testing of printed circuit (PC) conductors on a substrate by a scanning electron beam probe is simplified by using a "pull-up" resistor network and multiplexer technique. A scanning electron beam 1, which may be generated by a scanning electron microscope (SEM), is deflected to one end of a printed circuit conductor 3 while the other end of the conductor is connected to a voltage source +V, via a contact 3 and one of a plurality of "pull-up" resistors 5. All of the conductors except the selected one are held to a predetermined voltage level, e.g., positive while the selected conductor is connected to a different predetermined voltage level, e.g.