Browse Prior Art Database

Chrome Surface Contamination Standard

IP.com Disclosure Number: IPCOM000061862D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Schmidt, DA [+details]

Abstract

A technique is described which will produce a semiconductor photomask surface contamination and defect standard in the 0.5 um to 1.0 um range for use as a calibration tool for photomask particle detection systems. The standard may be cleaned and reused many times without deterioration.