Pattern Transfer of Nitride Etch by Using High Composition of Hydrogen in a Mixture of H2/cf4
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09
A CF4 and H2 etch gas mixture has been used in the prior art to enhance the selective etching of Si3N4 thin films. However, the high etch rate selectivity usually resulted in unwanted polymer residue formation. The amount of polymer formation is known to be directly related to the concentration of H2 in the etch gas.