Browse Prior Art Database

Ion Milling With Argon And Hydrogen Mixture

IP.com Disclosure Number: IPCOM000061905D
Original Publication Date: 1986-Jul-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Campbell, RT Lo, J [+details]

Abstract

An ion milling process is described in which a mixture of argon and hydrogen is used which enables better control over the milling process.