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Dark-field Fiber-optic Mask Illuminator

IP.com Disclosure Number: IPCOM000061959D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Jain, K [+details]

Abstract

An auxiliary optical system is described which is designed to provide dark-field illumination at the mask and wafer for alignment purposes for a photolithographic exposure tool which us laser light source.