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Semiconductor Annealing Variable Heat Reflection

IP.com Disclosure Number: IPCOM000061971D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Marks, RF Webb, DJ [+details]

Abstract

The use of a movable reflective metal foil outside an annealing cavity tube permits varying cavity reflectance which in turn permits improved control over heating and cooling.