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The use of a movable reflective metal foil outside an annealing cavity tube permits varying cavity reflectance which in turn permits improved control over heating and cooling.
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Semiconductor Annealing Variable Heat Reflection
The use of a movable reflective metal foil outside an annealing cavity tube
permits varying cavity reflectance which in turn permits improved control over
heating and cooling.
The structure is shown in the figure.
A slotted quartz tube is provided through which a reflective metal foil is
inserted at the start of the heating cycle. Tantalum or chromium plated nickel is
satisfactory. When rapid cooling is required, the reflective foil is withdrawn
partially or completely. By selecting the proper location for the slot, uniform
irradiation (temperature) at the sample surface can be maintained while reflector
area is widely varied.