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Semiconductor Annealing Variable Heat Reflection Disclosure Number: IPCOM000061971D
Original Publication Date: 1986-Aug-01
Included in the Prior Art Database: 2005-Mar-09

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Marks, RF Webb, DJ [+details]


The use of a movable reflective metal foil outside an annealing cavity tube permits varying cavity reflectance which in turn permits improved control over heating and cooling.