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Stepper Focus Compensation for Atmospheric Pressure Variations

IP.com Disclosure Number: IPCOM000061986D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Bakeman, PE Duncan, BF Hakey, MC Horak, DV [+details]

Abstract

A novel real time focus compensation technique is presented for current reduction step and repeat semiconductor tooling which negates the current need for focus adjustment with changes in barometric pressure.