Browse Prior Art Database

Exposure Site Cleaning for Glass Mask

IP.com Disclosure Number: IPCOM000062002D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Doxsey, W Jones, SA Leverenz, C Weigel, W Will, DG [+details]

Abstract

A modification to a glass mask tool photohead makes it possible to have a clean surface on the glass prior to subsequent processing. The proposal achieves the cleaning at the tim exposure, thereby eliminating the possibility of recontamination.