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Exposure Site Cleaning for Glass Mask Disclosure Number: IPCOM000062002D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09

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Related People

Doxsey, W Jones, SA Leverenz, C Weigel, W Will, DG [+details]


A modification to a glass mask tool photohead makes it possible to have a clean surface on the glass prior to subsequent processing. The proposal achieves the cleaning at the tim exposure, thereby eliminating the possibility of recontamination.