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High Resolution Molybdenum Masks by Laser Etching

IP.com Disclosure Number: IPCOM000062022D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Koren, G Ritsko, JJ [+details]

Abstract

Thin Molybdenum (Mo) masks are used as templates through which metal paste is screened onto ceramic green sheets to form conducting lines after lamination and sintering. In forming t masks, the conventional wet lithographic processes can only make lines as small as 3 mils wide. The process described here is a simple dry process which can easily produce slots 1 mil wide in 2 mil Mo sheet. These slots can be separated by as little as 3 mils. The physical effect used in forming these masks is the laser burning of Mo metal in air. This article describes the application of that physical effect to the problem of Mo mask manufacture and repair.