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Alumina Insulation in Ion Implantation Hot Cathodes

IP.com Disclosure Number: IPCOM000062023D
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Mitchell, JW [+details]

Abstract

Alumina when used as a replacement for insulators in hot cathode sources in ion implantation has advantages due to high purity, good electrical insulation, good thermal conductivity at high temperatures and strength. The alumina can be sandblasted to recondition parts for re-use.