Alumina Insulation in Ion Implantation Hot Cathodes
Original Publication Date: 1986-Sep-01
Included in the Prior Art Database: 2005-Mar-09
Alumina when used as a replacement for insulators in hot cathode sources in ion implantation has advantages due to high purity, good electrical insulation, good thermal conductivity at high temperatures and strength. The alumina can be sandblasted to recondition parts for re-use.