Centrifuge With Automatic Load-Unload
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
In the semiconductor industry the wet process operation requires a centrifuge load-unload operation, either at the wet bench drying level or for the so-called spray processor equipment. Several solutions are currently proposed to automate the operation, most of them using a sophisticated, expensive robot. Here, we describe a hard automation solution which allows the user to maintain the high capacity of classical wet benches while providing low-cost automatic product handling. Basically, the tool is a high capacity (several wafer carriers) centrifuge, with almost a horizontal axis, provided with a handling mechanism having two sub-systems. The first sub-system is a conveyor bringing the wafer-carriers into the location to be loaded-unloaded inside the centrifuge by the second sub-system, which is a push-pull mechanical fixture.