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Greensheet Distortion Compensator Disclosure Number: IPCOM000062116D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09

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Benzell, RA LaVine, MG Long, DC Stroms, KF [+details]


Distortions may occur in the punching of holes in glass ceramic green sheets used for semiconductor devices. A method has been proposed to pre-distort the hole pattern prior to punching so that a compensatory effect is achieved which will offset the distortion resulting as a result of the punching action used to make the holes. Greater distortions are experienced when punching and processing large green sheets with denser patterns and smaller via holes. In the punching process the desire is to achieve a pattern Fig. 1-1 without any distortion. Under the usual conditions, an uncompensated distorted pattern 2 may result following punching. The proposal would alter the pattern 3 prior to punching by means of a compensated program. The final pattern 4 achieved after punching would match that in the original design 1.