Two-Position Device Allowing a Centrifugal Machine Spinning About a Vertical Axis to Be Automatically Loaded With Two Wafer Carriers
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
This device is provided to allow a centrifugal machine spinning about a vertical axis to be automatically loaded and unloaded with two wafer carriers, by means of a handling robot currently provided in highly efficient integrated circuit production lines. The operation will be understood by reference to Figs. 1-3. The spinning plate of the centrifugal machine is provided with two diametrically opposed rocking supports each one of them accommodating a wafer carrier. Each rocking support is provided with a steel balance weight to be protected with a protective layer that does not deteriorate. The supports freely rock about an horizontal pin which should never produce any particles. When the centrifugal machine is at rest, the balance weight is in low position and the wafers lay in a vertical plane in their carrier.