Wedge Drive Assembly
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
This article describes a wedge drive assembly which allows machine "zero" and electronic control "zero" to be accomplished independently prior to a substrate test. There are three wedge drive assemblies X, Y and theta (/) in this system, as shown in Fig. 1. The X and Y wedge drives are shown in detail in Fig. 2. Each converts rotary motion of its geneva driven reduced gear box, as illustrated in Fig. 3, to linear motion to position the X and Y rings (tables) 4 and 5, respectively. This is done through a connector arm 6 (Fig. 2) which is fastened and doweled to each of the respective X and Y rings. In the case of the / wedge drive, rotary motion is converted to an angular motion in that a gear sector is substituted for the connector arm of the "X" and "Y" drives.