Browse Prior Art Database

Improved Plasma Reactor Design

IP.com Disclosure Number: IPCOM000062237D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Herrmann, WF Hoffarth, JG Tiemann, LA [+details]

Abstract

In present plasma reactors, gas enters the reactor through one or more ports, and it is assumed that the gas will distribute itself throughout the reactor.