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In present plasma reactors, gas enters the reactor through one or more ports, and it is assumed that the gas will distribute itself throughout the reactor.
English (United States)
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Improved Plasma Reactor Design
In present plasma reactors, gas enters the reactor through one or more ports,
and it is assumed that the gas will distribute itself throughout the reactor.
The manner in which gas distributes itself in a reactor affects the uniformity of
the plasma reaction throughout the reactor.
Improved uniformity could be achieved by an improved means of distributing
the gas in the reactor. An improved gas flow in the reactor can be achieved by
distributing the gas through holes in the electrodes. The hole pattern in the
electrodes should be such as to allow concentration of the reactive species over
the specific areas to be etched. The reactive species can be channeled to
specific areas where they are nee
The net result is a substantial improvement in uniformity.