Browse Prior Art Database

Improved Rotary High Vacuum Valve

IP.com Disclosure Number: IPCOM000062241D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Mantilla, OA Walker, JE [+details]

Abstract

Rotary high-vacuum gate valves use a thin layer of gas to separate a rotating valve member from a stationary member. bearing vacuum valves rely on the conductance of the very small separation between members (i.e., the ability of gas to flow through a small slot) to seal a high vacuum chamber from room environment.