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Tungsten wirebonding tips subjected to high temperature such as lasers, can be given extended life by forming a tungsten silicide coating on the tip surfaces.
English (United States)
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Protective Coating for Wirebonding Tips
Tungsten wirebonding tips subjected to high temperature such as lasers, can
be given extended life by forming a tungsten silicide coating on the tip surfaces.
Referring to the FIGURE, a pair of tungsten bonding tips 1 are given a
coating 2 of sputtered silicon. The coated tips are annealed at about 1000oC in
a high vacuum or inert atmosphere to allow interdiffusion of silicon and tungsten
to form tungsten silicide. This coating prevents subsequent diffusion of oxygen
into the tip material and adheres well to prevent coating damage during thermal