Tilted Vertical Illumination for Linear Detctor Arrays
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09
A vertical illumination optical inspection system is provided and comprises an imaging system having a linear detector array which is tilted at a first small angle from the normal to the object of interest, and an illuminating system for illuminating the object, where the illuminating system is tilted at an angle from the normal to the object which is an equal but opposite angle to said first small angle. The disclosed system eliminates the need for beam splitters which typically reduce the light reaching the image by a factor of four in vertical illuminators, as well as causing polarization effects and aberrations. The system also eliminates the need for light trap.