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The ability of a fiber grating to produce a two-dimensional array of light spots when illuminated by a laser finds particular utility in performing fast simultaneous inspection of multiple locations.
English (United States)
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Optical Inspection With Fiber Grating
The ability of a fiber grating to produce a two-dimensional array of light spots
when illuminated by a laser finds particular utility in performing fast simultaneous
inspection of multiple locations.
Referring to the Figure, light from laser 1 illuminates grating
2 of crossed optical fibers to generate a two-dimensional array of
multiple beams 3 directed via lens 4 to locations 5 at workpiece 6.
Workpiece 6 may be a substrate having a plurality of regularly
arranged pads 5 each carrying a solder ball. The presence or size of
the solder balls can be noted by detecting the uniformity of
reflected light at each pad with a microscope 7 or lens 8 to focus
the reflected light beams onto an array of photodetectors
An alternate application for the fiber grating setup is as part of a thickness
monitor for large areas when depositing transparent coatings. In such
arrangements the interference fringe pattern between light reflected from the top
and bottom surfaces of a transparent film being deposited can be monitored
concurrently at many locations on a work area. In this case either a one- or two-
dimensional fiber grating can be used.
Distance between adjacent light spots produced by the grating is a function
of the diameter of the grating fibers, laser wavelength and focal length of