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Particle Removal And Analysis Method

IP.com Disclosure Number: IPCOM000062270D
Original Publication Date: 1986-Oct-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Cooper, DW Wolfe, HL [+details]

Abstract

The removal of small, micron-size particles from a surface by an electric field can be accomplished more advantageously within a high-quality vacuum system.