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Method of Measuring Line Width

IP.com Disclosure Number: IPCOM000062273D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Hsu, YS [+details]

Abstract

This article relates generally to circuit line inspection and, more particularly, to a method of determining the width of circuit lines. Variations in circuit line widths can be simply determined from the nominal width values and voltage measurements without the necessity of constructing a van der Pauw pattern for finding sheet resistance. Referring to the figure, a circuit line extending between terminals 1 and 2 has nominal widths w or mw and lengths L or nL, where m and n are any positive numbers greater than one. When a current I is injected between terminals 1 and 2, voltage differences V1, V2 and V3 are measured between respective lands 3 and 4, 4 and 5, and 6 and 7.