Browse Prior Art Database

Machine for Continuous Processing of Sheet-Transported Material in a High Vacuum Chamber

IP.com Disclosure Number: IPCOM000062401D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Carden, GR Suflita, MJ Susko, JR [+details]

Abstract

A high vacuum process chamber applies a variety of chemicals, for sheet-transported material, without vacuum interruption in a graduated vacuum chamber process. The material is introduced into the process chamber through one or more antechambers that are connected to a vacuum pump which lowers the pressure. The material continues into the adjacent chamber where vacuum is incremented until the process chamber is reached where the desired pressure is maintained (see drawing). Similarly, upon leaving the process chamber(s), the material passes through one or more post- process chambers which step the pressure back up to atmospheric. Depending on the particular process needs, the material can be introduced on a continuous, non-stop basis.