Determination of Lateral and Energy Resolution in Small-Spot ESCA Spectrometers
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09
For verifying the specifications of ESCA (Electron Spectroscopy for Chemical Analysis) spectrometers, a test sample is prepared with a test area patterned to match the size of the expected X-ray beam/analysis area. The highly polished sample substrate may be made of a metal, such as Au, Cu or brass, onto which the test area is deposited (by sputtering or evaporation) as a thin film of a material, such as Ag, Al or C, using a suitable masking process. The mask opening can be cut by a focussed laser beam. A typical size of test area is 200 mm x 285 mm for a 45Œ take-off angle. As the ESCA signals from the test area and the sample material differ, any substrate signal indicates X-ray flux outside the specified test area and thus lateral deviations of the X-ray beam/analysis area caused by aberrations and the like.