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Semi-Solidified Resist Remover

IP.com Disclosure Number: IPCOM000062434D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
McCauley, JJ [+details]

Abstract

In the photoresist processing of various products, the resist, after being developed, is stripped. It is typically stripped in a solution where resist settles in the process tank in a semi-solidified form, where it must be removed. A device for removing the resist works in the following manner. As seen in the drawing, the tool 1 is made of titanium and consists of opposing jaws 2 that pivot at point A. The tool removes resist by entering the process tank (not shown), to be cleaned, with the flat edges 3 of jaws 2 moving down on an X-axis on the side of the tank to be cleaned. As tool 1 lowers into the tank, it gathers resist until the resist solution reaches the top of edge 3 when the tool is closed by rotating opposing jaws 2 about point A until fully closed.