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RF Evaporation Source

IP.com Disclosure Number: IPCOM000062447D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Bordt, H Clausnitzer, D Wolfer, H [+details]

Abstract

The RF (radio frequency) evaporation source consists of a crucible 1 with a removable lid 2. An RF coil 3, taking the form of a hollow conductor, is arranged inside crucible 1 which also contains the material to be evaporated and the substrate (not shown) on which the material is to be deposited. Evaporation of the material is effected by eddy current heating which is triggered by applying an RF voltage to coil 3. Lid 2 comprises a cooling tube 4 connected in series to coil 3. The water used for cooling flows through the common inlet of the RF and the cooling water connection 5, lid 2 and the hollow conductor of coil 3 to outlet 6.