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Centrifuge Enhancement Tool Disclosure Number: IPCOM000062465D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue


Related People

Devaney, BM [+details]


Contamination of semiconductor wafers is reduced by the use of a hand tool designed to tilt and lock a centrifuge wafer boat cradle such that it is no longer necessary for an operator to lean over the centrifuge during insertion or removal of wafers. The locking feature holds the cradle at the appropriate angle while the operator is free to use both hands to load or unload wafers. Single-handed loading, requiring the operator's gloved hand to be above the wafers, can also contribute to wafer contamination. Fig. 1 is a side view of the centrifuge wafer boat cradle. A wafer carrier (boat) is loaded and unloaded through the top of the cradle. Fig. 2 is the enhancement tool which is a demountable metal lever having a nylon lined socket 2 on its left hand end and a hand grip 4 on its right hand end.