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Luminescence Measurement of Photoresist Thickness

IP.com Disclosure Number: IPCOM000062486D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Batchelder, JS [+details]

Abstract

Photoresist luminescence can be used to measure resist thickness on rough substrates like glass-epoxy and ceramic. Low power light pulse excitation can either induce the photoresist itself or a luminescent dye dissolved in the photoresist to emit light proportional to the photoresist thickness. The required light intensities would be well below those intensities required for photoresist exposure. Organic materials luminesce (emit fluorescence or phosphorescence) when excited by utlraviolet light. For low levels of excitation, the amount of luminescence is proportional to the amount of ultraviolet light absorbed.