Micromechanical Thermometer With 10-3k to 102k Range
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09
This thermometer comprises an oscillating micromechanical beam 1 and a circular membrane 2, both consisting of SiO2 and arranged at a mutual distance of about 10 mm. Membrane 2 carries a gold tip 3 at its center, which forms a gap 4 of about 2 mm width with beam 1. Membrane 2 and beam 1 are mounted on a circular support 5 which rests on a conductive base 6. With the dimensions indicated in the figure, beam 1 has an eigenfrequency of about 5 kHz. It can be made to deflect towards membrane 2 by means of a deflection voltage Vd applied between gold electrodes 7 and 8, respectively coated on beam 1 and membrane 2. With Vd adjusted appropriately, gap 4 can be made small enough to permit a constant tunneling current IT to flow when a tunnel potential VT is applied between electrode 7 and tip 3.