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Multi-wafer Vacuum Carrier Disclosure Number: IPCOM000062734D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

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Hannah, JW Lucas, JA Ross, T [+details]


A proposal suggests the use of a vacuum instead of mechanical holddown clamps in carriers for transporting semiconductor wafers. The method makes it possible to carry different size wafers in the carrier as opposed to a single wafer carrier for each specific size.