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Lpcvd Injector Alignment Tool

IP.com Disclosure Number: IPCOM000062738D
Original Publication Date: 1986-Nov-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Springer, LK Young, MA [+details]

Abstract

The LPCVD Injector Alignment Tool provides an accurate reference for both the lateral and rotational alignment of the quartz injectors in the LPCVD phosphosilicate glass system. Referring to Fig. 1, which is a front view of an LPCVD PSG system, two injector tubes 10 and 12 are illustrated. Each of these tubes includes a line of small injector orifices 14 along approximately one-half the length of the injector tubes 10 and 12.