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Interferometric Video Autofocus

IP.com Disclosure Number: IPCOM000062790D
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Glaser, I Katzir, Y Strand, TC [+details]

Abstract

In interferometric microscopy, the tolerances on focus error are much tighter than in normal microscopy. These tight tolerances increase the need for an autofocus capability. However, normal autofocus techniques are inadequate.