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Growing Epitaxial Layers On Oxides

IP.com Disclosure Number: IPCOM000062800D
Original Publication Date: 1986-Dec-01
Included in the Prior Art Database: 2005-Mar-09

Publishing Venue

IBM

Related People

Authors:
Angilello, J [+details]

Abstract

A method is described for growing epitaxial layers over oxide regions or amorphous regions. To do so, a moving slit (or moving substrate) is used to guide the epitaxial growth, as shown schematically in the figure.