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PROCESS FOR FINELY DIVIDED PARTICLES OF SiCx

IP.com Disclosure Number: IPCOM000062816D
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Marinace, JC [+details]

Abstract

A powder of SiCx is made by the pyrolytic decomposition of triethylsilane, (C2H5)3SiH; trimethylsilane, (CH3)3SiH; tetraethylsilane, (C2H5)4Si; or tetramethylsilane, (CH3)4Si, in an inert atmosphere. The powder color is tan to black, depending upon the value of x. The value of x can be varied by the admixture of varying concentrations of oxygen to the inert carrier gas. The particles of the powder, no matter what the color, are amorphous and hard. They can be converted to crystalline b SiC by firing in air from 1000 to 1400ŒC. In either form, the particles are ready for use as an abrasive or paint pigment.