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Polarization Enhancement Feature on 4dm Vision Engineering Dynascope

IP.com Disclosure Number: IPCOM000062855D
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Cerniglia, TJ Powles, RW Thorp, LD [+details]

Abstract

This article concerns the use of polarizers in conjunction with a commercially available dynascope so as to optically enhance defects that are sought within the field of view. The disclosed instrumentation enhancement consists of the addition of polarizers to light sources and objective lens of a dynascope system, thereafter using disclosed nulling procedures to optically enhance defects to the benefit of inspection goals. The figure above illustrates the instrumentation system complete with the modifications described in this article. A 4 DM Model Dynascope system, manufactured by Vision Engineering, has been modified, as shown, with the addition of dichroic sheet polarizers mounted on the objective lens (PL) and the illumination source lenses (PS).