Adhesion Promoter for Substrate Photoresist Applications
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-18
This process introduces imidazole or its analogs on the substrate, prior to photoresist application, to improve photoresist adhesion without affecting the shelf-life of the resist. The addition of imidazole (glyoxaline) and its analogs to photoresists (e.g., positive diazoquinone-type photoresists) improves adhesion and wettability of photoresists to substrates. However, imidazole shortens the shelf-life of photoresists. This process primes the substrate with imidazole containing compounds either by spin-on or vapor-phase treatment prior to photoresist application.