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Adhesion Promoter for Substrate Photoresist Applications

IP.com Disclosure Number: IPCOM000062887D
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Yang, BJ Yang, JM [+details]

Abstract

This process introduces imidazole or its analogs on the substrate, prior to photoresist application, to improve photoresist adhesion without affecting the shelf-life of the resist. The addition of imidazole (glyoxaline) and its analogs to photoresists (e.g., positive diazoquinone-type photoresists) improves adhesion and wettability of photoresists to substrates. However, imidazole shortens the shelf-life of photoresists. This process primes the substrate with imidazole containing compounds either by spin-on or vapor-phase treatment prior to photoresist application.