Fast Scan Piezo Drive
Original Publication Date: 1985-Mar-01
Included in the Prior Art Database: 2005-Feb-18
Known in the art of positioning the electron-emitting tip in scanning tunneling and scanning electron microscopes are piezoelectric drives having three legs 1, 2, 3 associated with coordinates x, y, z, respectively. The tip is fixed at the joint of the three legs. An extension of that concept comprises another piezoelectric element having two arms 5z, 6z attached to the joint 7 of the three legs 1, 2, 3 and extending parallel to one coordinate, e.g., the z-coordinate. The tip 8 is fixed to the end of one arm 5z, the other arm 6z serving as a counterbalance. Both arms 5z, 6z carry electrodes so that, when they are energized, the center portion 9 of the additional arms 5z, 6z stays at rest. This has the desired effect of the tip 8 being less subjected to vibrations during movement.